The advent of the integrated circuit in 1959 led to the miniaturization and development of a plethora of commercial and industrial devices. However, these miniature circuits are no longer limited to transistors and capacitors. Motors, valves, and sensors can be combined with electronic components to form a complete system. Just as integrated circuits have revolutionized electronics, so MEMS (microelectrical-mechanical systems) will revolutionize medical devices, biosensors and consumer products of the future.